Non-planar semiconductor device having hybrid geometry-based active region

ABSTRACT

Non-planar semiconductor devices having hybrid geometry-based active regions are described. For example, a semiconductor device includes a hybrid channel region including a nanowire portion disposed above an omega-FET portion disposed above a fin-FET portion. A gate stack is disposed on exposed surfaces of the hybrid channel region. The gate stack includes a gate dielectric layer and a gate electrode disposed on the gate dielectric layer. Source and drain regions are disposed on either side of the hybrid channel region.

CLAIM OF PRIORITY

This application is a Continuation of U.S. patent application Ser. No.15/024,714 filed Mar. 24, 2016, which is a U.S. National Phaseapplication under 35 U.S.C. § 371 of International Application No.PCT/US2013/076651, filed Dec. 19, 2013, entitled “NON-PLANARSEMICONDUCTOR DEVICE HAVING HYBRID GEOMETRY-BASED ACTIVE REGION” theentire contents of which are incorporated herein by reference.

TECHNICAL FIELD

Embodiments of the invention are in the field of semiconductor devicesand, in particular, non-planar semiconductor devices having hybridgeometry-based active regions.

BACKGROUND

For the past several decades, the scaling of features in integratedcircuits has been a driving force behind an ever-growing semiconductorindustry. Scaling to smaller and smaller features enables increaseddensities of functional units on the limited real estate ofsemiconductor chips. For example, shrinking transistor size allows forthe incorporation of an increased number of memory devices on a chip,lending to the fabrication of products with increased capacity. Thedrive for ever-more capacity, however, is not without issue. Thenecessity to optimize the performance of each device becomesincreasingly significant.

In the manufacture of integrated circuit devices, multi-gatetransistors, such as tri-gate transistors, or gate-all-around devices,such as nanowires, have become more prevalent as device dimensionscontinue to scale down. Many different techniques have been attempted toreduce channel or external resistance of such transistors. However,significant improvements are still needed in the area of channel orexternal resistance suppression. Also, many different techniques havebeen attempted to manufacture devices with non-Si channel materials suchas SiGe, Ge, and III-V materials. However, significant processimprovements are still needed to integrate these materials onto Siwafers.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional view of a state-of-the-art releaseetch process taken along a channel region of a multi-wire semiconductordevice.

FIG. 2 illustrates a cross-sectional view of a release etch processtaken along a channel region of a multi-wire semiconductor device, inaccordance with an embodiment of the present invention.

FIG. 3 is a Table depicting cross-section views of a variety ofachievable hybrid geometry-based active regions formed using a releaseetch, with device types contributing to the hybrid geometry listed alongthe vertical and horizontal axes, in accordance with an embodiment ofthe present invention.

FIG. 4A illustrates a three-dimensional cross-sectional view of ananowire-based semiconductor structure having a hybrid geometry-basedactive region, in accordance with an embodiment of the presentinvention.

FIG. 4B illustrates a cross-sectional channel view of the nanowire-basedsemiconductor structure of FIG. 4A, as taken along the a-a′ axis, inaccordance with an embodiment of the present invention.

FIG. 4C illustrates a cross-sectional spacer view of the nanowire-basedsemiconductor structure of FIG. 4A, as taken along the b-b′ axis, inaccordance with an embodiment of the present invention.

FIGS. 5A-5E illustrate three-dimensional cross-sectional viewsrepresenting various operations in a method of fabricating asemiconductor structure having a hybrid geometry-based active region, inaccordance with an embodiment of the present invention.

FIG. 6 illustrates a computing device in accordance with oneimplementation of the invention.

DESCRIPTION OF THE EMBODIMENTS

Non-planar semiconductor devices having hybrid geometry-based activeregions are described. In the following description, numerous specificdetails are set forth, such as specific integration and materialregimes, in order to provide a thorough understanding of embodiments ofthe present invention. It will be apparent to one skilled in the artthat embodiments of the present invention may be practiced without thesespecific details. In other instances, well-known features, such asintegrated circuit design layouts, are not described in detail in orderto not unnecessarily obscure embodiments of the present invention.Furthermore, it is to be understood that the various embodiments shownin the Figures are illustrative representations and are not necessarilydrawn to scale.

One or more embodiments described herein are directed tonanowire-trigate-omega field effect transistor (FET) hybrid MOStransistors. Hybrid geometries for active regions of such devicesinclude geometries contributed by, or dominated by, finFET geometries,nanowire geometries, or trigate geometries.

Generally, new device structures are described that take advantage of ahybrid contribution of two of nanowire, trigate, or omega FETarchitectures. One or more embodiments include devices using such hybridactive regions having reduced external resistance (Rext) and capacitanceas otherwise observed for fully formed nanowire-type transistors.Furthermore, improved short channel effects (e.g., reduced leakage) areachieved as otherwise observed for trigate devices. Thus, semiconductordevice manufacturing schemes targeting optimal structures for takingadvantages of trigate, omega FET and wire transistors into a singledevice are described herein. One or more embodiments may be applicablefor high performance, low leakage logic complementary metal oxidesemiconductor (CMOS) devices.

More specifically, one or more embodiments described herein are directedto approaches for forming silicon (Si)-containing non-planararchitectures. For example, in an embodiment one or more devicesdescribed herein may be characterized as a Si-based device, ananoribbon-based device, a nanowire-based device, a non-planartransistor, an omega-FET, a trigate-based device, a multi-gate device,or a combination thereof. More specifically, one or more embodiments aredirected to performing a total or partial release of Si-containingfeatures from SiGe/Si multilayer stacks.

To provide context, FIG. 1 illustrates a cross-sectional view of astate-of-the-art release etch process taken along a channel region of amulti-wire semiconductor device. Referring to FIG. 1, a channel cut of asemiconductor stack 100 having a plurality of sacrificial layers 102 andsilicon-based nanowire structures 104 is formed above a substrate 106.Upon selectively etching to remove the sacrificial layers 102 to providereleased stack 110, a channel region is formed based on nanowirestructures 104 is etched due to high selectivity. In the specific caseshown in FIG. 1, rectangular nanowire structures 104 with squaredcorners are essentially preserved during the release etch to leavereleased rectangular nanowire structures 104 with squared corners.

By contrast, in accordance with an embodiment of the present invention,hybrid geometry structures are formed by utilizing variable sacrificialepitaxial layers. For example, a single wire/omega/fin hybrid can bemade by starting with Si/SiGe/Si/SiGe, where the epitaxial SiGe layershave different relative Ge concentrations. As an example, FIG. 2illustrates a cross-sectional view of a release etch process taken alonga channel region of a multi-wire semiconductor device, in accordancewith an embodiment of the present invention.

Referring to FIG. 2, a channel cut of a semiconductor stack 200 has afirst sacrificial layer 202, a first silicon layer 204, a secondsacrificial layer 206, and a second silicon layer 208 formed above asubstrate 210. The first sacrificial layer 202 has a composition closerto silicon than the second sacrificial layer 206. For example, in oneembodiment, the first sacrificial layer 202 is composed of 20% germaniumand 80% silicon, while the second sacrificial layer 206 is composed of30% germanium and 70% silicon. Thus, referring to the resultingstructure 250, when applying an etch that favors germanium over silicon,the second sacrificial layer 206 etches faster than the firstsacrificial layer 202. Furthermore, upon terminating the selectiveetching after complete removal of the second sacrificial layer 206, butprior to complete removal of the first sacrificial layer 202, a portion252 of the second sacrificial layer 206 can be retained in the finalchannel region stack. In the particular example shown in FIG. 2, thesilicon layer 208 forms a nanowire channel portion upon release. Thesilicon layer 204 and the portion 252 of the second sacrificial layer206 form an omega FET portion. And, in the case of a bulk siliconsubstrate 210, the protruding portion of the substrate 210 forms afin-FET or trigate portion.

Referring again to FIG. 2, in an exemplary embodiment, the releaselayers 202 and 206 are composed of silicon germanium. It is to beappreciated that although described above as 20%-Ge-based SiGe and30%-Ge-based SiGe, respectively, the above selective etching to removeall of one layer while retaining a portion of another layer can beachieved for a variety of pairings of Si_(x)Ge_(1-x) for layer 202 andSi_(y)Ge_(1-y) for layer 206, where x>y. It is also to be appreciatedthat the sacrificial layers 202 and 206 may be reversed in location inorder to retain a portion of the second sacrificial layer 206, yetcompletely removing the first sacrificial layer 202, and providing adifferent hybrid geometry. Other stacks providing a similar etchdifferentiating arrangements may also be used. For example, in anembodiment, an appropriate arrangement of group III-V materials may beused instead of the above described hetero-structure based on siliconand silicon germanium layers.

In an embodiment, the fully retained layers 204 and 208 and possibly thesubstrate 210 and are composed essentially of silicon. The termssilicon, pure silicon or essentially pure silicon may be used todescribe a silicon material composed of a very substantial amount of, ifnot all, silicon. However, it is to be understood that, practically,100% pure silicon may be difficult to form in the presence of silicongermanium release layers and, hence, could include a tiny percentage ofGe. The Ge may be included as an unavoidable impurity or componentduring deposition of Si or may “contaminate” the Si upon diffusionduring post deposition processing. As such, embodiments described hereindirected to a Si channel portion may include Si channel portions thatcontain a relatively small amount, e.g., “impurity” level, non-Si atomsor species, such as Ge. By contrast, active regions that include aretained portion of a silicon germanium release layer have a significantamount of germanium, e.g., a sufficient amount to provide etchselectivity relative to adjacent retained “pure” silicon features.

Referring again to FIG. 2, in an embodiment where the layers ofsemiconductor material 204 and 208 are silicon and the layers ofsacrificial material 202 and 206 are silicon germanium, the layers ofsacrificial material 202 and 206 may be selectively removed using a wetetchant such as, but not limited to aqueous carboxylic acid/nitricacid/HF solution and aqueous citric acid/nitric acid/HF solution. Thetotal or partial removal of the layers of sacrificial material layers202 and 206 relative to one another can be tailored based on therelative amount of germanium included in the respective layer.

Referring again to FIG. 2, in an embodiment, the stack of the firstsacrificial layer 202, the first silicon layer 204, the secondsacrificial layer 206, and the second silicon layer 208 is formed on asilicon substrate. More particularly, the stack of layers may be formedon a silicon substrate and then etched, with the fin patterning etchextending partially into the substrate portion to provide a structuresuch as is shown on the left-hand side of FIG. 2. In it to beappreciated that substrates other than silicon may be used, such as, butnot limited to, germanium, silicon-germanium or a III-V substrate. Inany case, the silicon (or other) substrate is referred to as a bulksubstrate, and devices formed there from are referred to as bulkdevices. Examples of channel regions of such devices are depicted inFIG. 3. It is to be appreciated that, in the case of bulk devices, asubsequently formed permanent gate stack may be isolated from the bulksemiconductor substrate by a shallow trench isolation (STI) region or abottom gate isolation (BGI) structure. In other embodiments, a globalinsulating layer is disposed on the substrate, below the channel layers.FIGS. 4A-4C, described below, include an example of such devices.

As described in greater detail below, a variety of geometries forchannel regions are achievable using controlled etching of releaselayers. Semiconductor devices based on such channel regions may be asemiconductor device incorporating a gate, and a pair of source/drainregions. In an embodiment, the semiconductor device is a MOS-FET. In oneembodiment, the semiconductor device is a three-dimensional MOS-FET andis an isolated device or is one device in a plurality of nested devices.As will be appreciated for a typical integrated circuit, both N- andP-channel transistors may be fabricated on a single substrate to form aCMOS integrated circuit. Furthermore, additional interconnect wiring maybe fabricated in order to integrate such devices into an integratedcircuit.

In accordance with an embodiment of the present invention, then,epitaxial layer composition and undercut etch can enable one or more ofnanowire/trigate/omega FET portions combined in single device. Thehybrid structures can be utilized to optimize device performance andpower consumption. Flexibility in device channel structure may providepathways to optimize the device per application. As an example, FIG. 3is a Table 300 depicting cross-section views of a variety of achievablehybrid geometry-based active regions formed above a correspondingsubstrate 302 using a release etch, with device types contributing tothe hybrid geometry listed along the vertical and horizontal axes, inaccordance with an embodiment of the present invention.

Referring to Table 300, in an embodiment, two or more release layers areused for hybrid channel region formation, where one of the releaselayers has a different etch rate (e.g., by having less germanium) thanthe other release layer(s). For example, the fin/omega FET hybridchannel region 300C includes first and second silicon portions 304C and306C completely released from a third silicon portion 308C. A portion ofa silicon germanium release layer 310C is retained between the first andsecond silicon portions 304C and 306C. In another example, the omegaFET/one wire hybrid channel region 300E includes a first silicon portion304E completely released from a second silicon portion 306E. A portionof a silicon germanium release layer 310E is retained below the secondsilicon portion 306E. In another example, the omega FET/multi wirehybrid channel region 300F includes a first silicon portion 304Fcompletely released from a second silicon portion 306F which iscompletely released from a third silicon portion 308F. A portion of asilicon germanium release layer 310F is retained below the third siliconportion 308F. In another example, the wire/omega FET hybrid channelregion 300K includes a first silicon portion 304K and a second siliconportion 306K completely released from the substrate 302K. A portion of asilicon germanium release layer 310K is retained between the firstsilicon portion 304K and the second silicon portion 306K. In anotherexample, the omega plus fin/one wire hybrid channel region 300M includesa first silicon portion 304M completely released from a second siliconportion 306M. The second silicon portion 306M is coupled to a thirdsilicon portion 308M by a portion of a silicon germanium release layer310M. In another example, the omega plus fin/multi wire hybrid channelregion 300N includes a first silicon portion 304N completely releasedfrom a second silicon portion 306M completely released from a thirdsilicon portion 305N. The third silicon portion 305N is coupled to afourth silicon portion 308N by a portion of a silicon germanium releaselayer 310N. In another example, the omega plus fin/fin hybrid channelregion 300P includes a first silicon fin portion 304P completelyreleased from a second silicon portion 306P. The second silicon portion306P is coupled to a third silicon portion 308P by a portion of asilicon germanium release layer 310P.

In another embodiment, hybrid structures are formed by retainingportions of all release layers. In a first example, the omega FET/omegaFET hybrid 300G includes silicon regions 302G and partially etchedsilicon germanium release layers 304G. In a second example, the omegaplus fin/omega FET hybrid 300O includes silicon regions 302O andpartially etched silicon germanium release layers 304O. In yet anotherembodiment, hybrid structures are formed by completely etching allrelease layers present. Examples include the fin/one wire hybrid 300Aand the fin/multi wire hybrid 300B. Finally, it is to be appreciatedthat several “hybrid” examples in Table 300 are not actually hybridstructures but are presented for completeness of Table 300: the fin/finstructure 300D the wire/one wire structure 300I, the wire/multi wirestructure 300J, and the wire/fin structure 300L (which is actually avertical nanoribbon).

As mentioned above, hybrid channel regions structure need not befabricated from a bulk substrate, but instead may be fabricated above aninsulator layer disposed on a substrate. As an example, FIG. 4Aillustrates a three-dimensional cross-sectional view of a nanowire-basedsemiconductor structure having a hybrid geometry-based active region, inaccordance with another embodiment of the present invention. FIG. 4Billustrates a cross-sectional channel view of the nanowire-basedsemiconductor structure of FIG. 4A, as taken along the a-a′ axis, inaccordance with an embodiment of the present invention. FIG. 4Cillustrates a cross-sectional spacer view of the nanowire-basedsemiconductor structure of FIG. 4A, as taken along the b-b′ axis, inaccordance with an embodiment of the present invention.

Referring to FIG. 4A, a semiconductor device 400 includes one or morevertically stacked nanowires (404 set) disposed above a substrate 402.Embodiments herein are targeted at both single wire based hybrid devicesand multiple wire based devices. As an example, a three nanowire-baseddevices having nanowires 404A, 404B and 404C, where only the top wire iscompletely released from the other wires, is shown for illustrativepurposes. For convenience of description, nanowire 404A is used as anexample where description is focused on only one of the nanowires. It isto be understood that where attributes of one nanowire are described,embodiments based on a plurality of nanowires may have the sameattributes for each of the nanowires.

Referring again to FIG. 4A, the top nanowire 404C is completely releasedfrom the middle nanowire 404B. However, a portion of a release layer480B is retained between the middle nanowire 404B and the bottomnanowire 404A. Each of the nanowires 404A-404C and the retained portionof a release layer 480B contribute to a channel region 406, having alength (L).

Referring to both FIGS. 4A and 4B, a gate electrode stack 408 surroundsthe entire perimeter of the channel region 406. The gate electrode stack408 includes a gate electrode along with a gate dielectric layerdisposed between the channel region 406 and the gate electrode (notshown). The channel region 406 is discrete in that it is completelysurrounded by the gate electrode stack 408 without any interveningmaterial such as underlying substrate material.

In an embodiment, the nanowires 404A-404C may be sized as wires orribbons, and may have squared-off or rounded corners. In any case,however, in an embodiment, the sizing and shaping of each nanowire404A-404C is essentially the same as prior to a complete or partialrelease etch used to fabricate the nanowires 404A-404C. In anembodiment, the nanowires 404A-404C are uniaxially strained nanowires.The uniaxially strained nanowire or plurality of nanowires may beuniaxially strained with tensile strain or with compressive strain,e.g., for NMOS or PMOS, respectively.

The width and height of each of the nanowires 404A-404C is shown asapproximately the same, however, they need not be. For example, inanother embodiment (not shown), the width of the nanowires 404A-404C issubstantially greater than the height. In a specific embodiment, thewidth is approximately 2-10 times greater than the height. Nanowireswith such geometry may be referred to as nanoribbons. In an alternativeembodiment (also not shown), the nanoribbons are oriented vertically.That is, each of the nanowires 404A-404C has a width and a height, thewidth substantially less than the height.

Referring again to FIG. 4A, source and drain regions 410 and 412 areincluded on either side of the channel region 406. A pair of contacts414 is disposed over the source/drain regions 410/412. In an embodiment,the semiconductor device 400 further includes a pair of spacers 416. Thespacers 416 are disposed between the gate electrode stack 408 and thepair of contacts 414. As described above, one or more of the nanowires404A-404C, in at least several embodiments, is made to be discrete(e.g., by a selective wet etch process). However, not all regions of thenanowires 404 need be, or even can be made to be discrete. For example,referring to FIG. 4C, nanowires 404A-404C are not discrete at thelocation under spacers 416. In one embodiment, the stack of nanowires404A-404C has intervening semiconductor material 480B and 400A therebetween. For example, in one embodiment, at the channel region 406, theentire material 480A is removed, while only a portion of 480B isremoved, as is depicted in FIGS. 4A and 4B. Referring to FIG. 4C, in thespacer region, where etch access may be hindered, portions of both of480A and 480B remain. Furthermore, in one embodiment, the bottomnanowire 404A is still in contact with a portion of substrate 402, e.g.,in contact with an insulating layer portion disposed on a bulksubstrate.

Referring again to FIGS. 4A-4C, the substrate 402 may be composed of amaterial suitable for semiconductor device fabrication. In oneembodiment, substrate 402 includes a lower bulk substrate composed of asingle crystal of a material which may include, but is not limited to,silicon, germanium, silicon-germanium or a III-V compound semiconductormaterial. An upper insulator layer composed of a material which mayinclude, but is not limited to, silicon dioxide, silicon nitride orsilicon oxy-nitride is disposed on the lower bulk substrate. Thus, thestructure 400 may be fabricated from a startingsemiconductor-on-insulator substrate. As such, in one embodiment, theplurality of vertically stacked nanowires 404 is disposed above a bulkcrystalline substrate having an intervening dielectric layer disposedthereon, as depicted in FIGS. 4A-4C. Alternatively, the structure 400 isformed directly from a bulk substrate and local oxidation is used toform electrically insulative portions in place of the above describedupper insulator layer.

In an embodiment, referring again to FIG. 4A, the gate electrode of gateelectrode stack 408 is composed of a metal gate and the gate dielectriclayer is composed of a high-K material. For example, in one embodiment,the gate dielectric layer is composed of a material such as, but notlimited to, hafnium oxide, hafnium oxy-nitride, hafnium silicate,lanthanum oxide, zirconium oxide, zirconium silicate, tantalum oxide,barium strontium titanate, barium titanate, strontium titanate, yttriumoxide, aluminum oxide, lead scandium tantalum oxide, lead zinc niobate,or a combination thereof. Furthermore, a portion of gate dielectriclayer may include a layer of native oxide formed from the top few layersof the nanowire 404. In an embodiment, the gate dielectric layer iscomposed of a top high-k portion and a lower portion composed of anoxide of a semiconductor material. In one embodiment, the gatedielectric layer is composed of a top portion of hafnium oxide and abottom portion of silicon dioxide or silicon oxy-nitride.

In one embodiment, the gate electrode is composed of a metal layer suchas, but not limited to, metal nitrides, metal carbides, metal silicides,metal aluminides, hafnium, zirconium, titanium, tantalum, aluminum,ruthenium, palladium, platinum, cobalt, nickel or conductive metaloxides. In a specific embodiment, the gate electrode is composed of anon-workfunction-setting fill material formed above a metalworkfunction-setting layer.

In an embodiment, the spacers 416 are composed of an insulativedielectric material such as, but not limited to, silicon dioxide,silicon oxy-nitride or silicon nitride. The contacts 414 are, in anembodiment, fabricated from a metal species. The metal species may be apure metal, such as nickel or cobalt, or may be an alloy such as ametal-metal alloy or a metal-semiconductor alloy (e.g., such as asilicide material).

Referring again to FIG. 4A, each of the nanowires 404 also includessource and drain regions 410/412 disposed in or on the nanowire oneither side of the channel regions 406. In an embodiment, the source anddrain regions 410/412 are embedded source and drain regions, e.g., atleast a portion of the nanowires is removed and replaced with asource/drain material region. However, in another embodiment, the sourceand drain regions 410/412 are composed of, or at least include, portionsof the one or more nanowires 404.

In another aspect, a replacement gate process may be used to accesschannel regions to form hybrid geometry-based channel regions. As anexample, FIGS. 5A-5E illustrate three-dimensional cross-sectional viewsrepresenting various operations in a method of fabricating asemiconductor structure having a hybrid geometry-based active region, inaccordance with an embodiment of the present invention.

Referring to FIG. 5A, a fin 512 is formed above a silicon substrate 502.The fin includes silicon wire-forming layers 504 and 508. A firstsilicon germanium release layer 506 is disposed between the siliconwire-forming layers 504 and 508. A second silicon germanium releaselayer 510 is disposed between the silicon wire-forming layer 504 and thesilicon substrate 506. In an embodiment, the first silicon germaniumrelease layer 506 has a higher germanium content than the second silicongermanium release layer 510. It is to be appreciated that, in the caseof fabrication of bulk devices, a subsequently formed permanent gatestack may be isolated from the silicon substrate 502 by a shallow trenchisolation (STI) region formed after fin patterning, but prior to theprocesses described below in association with FIG. 5B. Alternatively, asubsequently formed permanent gate stack may be isolated from thesilicon substrate 502 by a bottom gate isolation (BGI) structure, whichmay be fabricated at the time of permanent gate stack fabrication.

In a specific example showing the formation of three gate structures,FIG. 5B illustrates the fin-type structure 512 with three sacrificialgates 514A, 514B, and 514C disposed thereon. In one such embodiment, thethree sacrificial gates 514A, 514B, and 514C are composed of asacrificial gate oxide layer 518 and a sacrificial polysilicon gatelayer 516 which are, e.g., blanket deposited and patterned with a plasmaetch process.

Following patterning to form the three sacrificial gates 514A, 514B, and514C, spacers may be formed on the sidewalls of the three sacrificialgates 514A, 514B, and 514C, doping may be performed in regions 520 ofthe fin-type structure 512 shown in FIG. 5B (e.g., tip and/or source anddrain type doping), and an interlayer dielectric layer may be formed tocover and then re-expose the three sacrificial gates 514A, 514B, and514C. The interlayer dielectric layer may then be polished to expose thethree sacrificial gates 514A, 514B, and 514C for a replacement gate, orgate-last, process. Referring to FIG. 5C, the three sacrificial gates514A, 514B, and 514C are exposed, along with spacers 522 and interlayerdielectric layer 524.

The sacrificial gates 514A, 514B, and 514C may then be removed, e.g., ina replacement gate or gate-last process flow, to expose channel portionsof the fin-type structure 512. Referring to FIG. 5D, the sacrificialgates 514A, 514B, and 514C are removed to provide trenches 526 and,thus, reveal channel locations. As depicted in FIG. 5D, a selective etchprocess is used to completely remove the first silicon germanium releaselayer 506, but only to partially remove the second silicon germaniumrelease layer 510 (i.e., to form thinned second silicon germaniumrelease layer 510′), thus forming a hybrid channel region in channellocation 526. In the particular example shown, a hybrid channel regionsuch as the omega FET/one wire hybrid channel region 300E is formed.

Following formation of the hybrid channel region as depicted in FIG. 5D,high-k gate dielectric and metal gate processing to form gate stacks 528may be performed, as depicted in FIG. 5E. Additionally, source and draincontacts may be added. Although not shown, contacts may be formed in theplace of the interlayer dielectric layer 524 portions remaining in FIG.5E.

FIG. 6 illustrates a computing device 600 in accordance with oneimplementation of the invention. The computing device 600 houses a board602. The board 602 may include a number of components, including but notlimited to a processor 604 and at least one communication chip 606. Theprocessor 604 is physically and electrically coupled to the board 602.In some implementations the at least one communication chip 606 is alsophysically and electrically coupled to the board 602. In furtherimplementations, the communication chip 606 is part of the processor604.

Depending on its applications, computing device 600 may include othercomponents that may or may not be physically and electrically coupled tothe board 602. These other components include, but are not limited to,volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flashmemory, a graphics processor, a digital signal processor, a cryptoprocessor, a chipset, an antenna, a display, a touchscreen display, atouchscreen controller, a battery, an audio codec, a video codec, apower amplifier, a global positioning system (GPS) device, a compass, anaccelerometer, a gyroscope, a speaker, a camera, and a mass storagedevice (such as hard disk drive, compact disk (CD), digital versatiledisk (DVD), and so forth).

The communication chip 606 enables wireless communications for thetransfer of data to and from the computing device 600. The term“wireless” and its derivatives may be used to describe circuits,devices, systems, methods, techniques, communications channels, etc.,that may communicate data through the use of modulated electromagneticradiation through a non-solid medium. The term does not imply that theassociated devices do not contain any wires, although in someembodiments they might not. The communication chip 606 may implement anyof a number of wireless standards or protocols, including but notlimited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE,GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well asany other wireless protocols that are designated as 3G, 4G, 5G, andbeyond. The computing device 600 may include a plurality ofcommunication chips 606. For instance, a first communication chip 606may be dedicated to shorter range wireless communications such as Wi-Fiand Bluetooth and a second communication chip 606 may be dedicated tolonger range wireless communications such as GPS, EDGE, GPRS, CDMA,WiMAX, LTE, Ev-DO, and others.

The processor 604 of the computing device 600 includes an integratedcircuit die packaged within the processor 604. In some implementationsof the invention, the integrated circuit die of the processor includesone or more devices, such as MOS-FET transistors built in accordancewith implementations of the invention. The term “processor” may refer toany device or portion of a device that processes electronic data fromregisters and/or memory to transform that electronic data into otherelectronic data that may be stored in registers and/or memory.

The communication chip 606 also includes an integrated circuit diepackaged within the communication chip 606. In accordance with anotherimplementation of the invention, the integrated circuit die of thecommunication chip includes one or more devices, such as MOS-FETtransistors built in accordance with implementations of the invention.

In further implementations, another component housed within thecomputing device 600 may contain an integrated circuit die that includesone or more devices, such as MOS-FET transistors built in accordancewith implementations of the invention.

In various implementations, the computing device 600 may be a laptop, anetbook, a notebook, an ultrabook, a smartphone, a tablet, a personaldigital assistant (PDA), an ultra mobile PC, a mobile phone, a desktopcomputer, a server, a printer, a scanner, a monitor, a set-top box, anentertainment control unit, a digital camera, a portable music player,or a digital video recorder. In further implementations, the computingdevice 600 may be any other electronic device that processes data.

Thus, embodiments of the present invention include non-planarsemiconductor devices having hybrid geometry-based active regions.

In an embodiment, a semiconductor device includes a hybrid channelregion including a nanowire portion disposed above an omega-FET portiondisposed above a fin-FET portion. A gate stack is disposed on exposedsurfaces of the hybrid channel region. The gate stack includes a gatedielectric layer and a gate electrode disposed on the gate dielectriclayer. Source and drain regions are disposed on either side of thehybrid channel region.

In one embodiment, the nanowire portion and the fin-FET portion of thehybrid channel region consist essentially of a first semiconductormaterial, and the omega-FET portion includes a bi-layer having an upperlayer consisting essentially of the first semiconductor material and alower layer consisting essentially of a second, different, semiconductormaterial.

In one embodiment, the first semiconductor material is silicon, and thesecond semiconductor material is silicon germanium.

In one embodiment, the lower layer of the omega-FET portion of thehybrid channel region is disposed on the fin-FET portion of the hybridchannel region.

In one embodiment, the fin-FET portion of the hybrid channel region iscontinuous with a bulk semiconductor substrate.

In one embodiment, the gate stack is isolated from the bulksemiconductor substrate by a shallow trench isolation (STI) region or abottom gate isolation (BGI) structure.

In an embodiment, a semiconductor device includes a hybrid channelregion having a first region disposed above a second region disposedabove and spaced apart from a third region. The hybrid channel regionalso includes a fourth region disposed between and in contact with thefirst and second regions. The first region, the second region and thethird region consist essentially of a first semiconductor material. Thefourth region consists essentially of a second, different, semiconductormaterial. A gate stack is disposed on exposed surfaces of the hybridchannel region. The gate stack includes a gate dielectric layer and agate electrode disposed on the gate dielectric layer. Source and drainregions are disposed on either side of the hybrid channel region.

In one embodiment, the first semiconductor material is silicon, and thesecond semiconductor material is silicon germanium.

In one embodiment, the hybrid channel region has a length between thesource and drain regions, and the fourth semiconductor region is shorterthan each of the first, second, and third semiconductor regions in adirection perpendicular to the length of the channel region.

In one embodiment, the third region of the hybrid channel region iscontinuous with a bulk semiconductor substrate.

In one embodiment, the gate stack is isolated from the bulksemiconductor substrate by a shallow trench isolation (STI) region or abottom gate isolation (BGI) structure.

In an embodiment, a semiconductor device includes a hybrid channelregion having a first region disposed above and spaced apart from asecond region disposed above a third region. The hybrid channel regionalso includes a fourth region disposed between and in contact with thesecond and third regions. The first region, the second region and thethird region consist essentially of a first semiconductor material, andthe fourth region consists essentially of a second, different,semiconductor material. A gate stack is disposed on exposed surfaces ofthe hybrid channel region. The gate stack includes a gate dielectriclayer and a gate electrode disposed on the gate dielectric layer. Sourceand drain regions are disposed on either side of the hybrid channelregion.

In one embodiment, the first semiconductor material is silicon, and thesecond semiconductor material is silicon germanium.

In one embodiment, the hybrid channel region has a length between thesource and drain regions, and the fourth semiconductor region is shorterthan each of the first, second, and third semiconductor regions in adirection perpendicular to the length of the channel region.

In one embodiment, the third region of the hybrid channel region iscontinuous with a bulk semiconductor substrate.

In one embodiment, the gate stack is isolated from the bulksemiconductor substrate by a shallow trench isolation (STI) region or abottom gate isolation (BGI) structure.

In an embodiment, a method of fabricating a hybrid geometry-basedsemiconductor structure involves forming an epitaxial material stackabove a semiconductor substrate. The epitaxial material stack includes afirst layer formed above a second layer formed above a third layerformed above a fourth layer formed on the semiconductor substrate. Thefirst layer, the third layer and the semiconductor substrate consistessentially of a first semiconductor material. The second layer consistsessentially of a second semiconductor material different than the firstsemiconductor material. The fourth layer consists essentially of a thirdsemiconductor material different than the first and second semiconductormaterials. The method also involves patterning the epitaxial materialstack and a portion of the semiconductor substrate to form asemiconductor fin. The method also involves exposing the semiconductorfin to an etchant to completely remove one of the second and thirdsemiconductor materials and to partially remove the other of the secondand third semiconductor materials selective to the first semiconductormaterial. The method also involves, subsequently, forming a gateelectrode stack on the semiconductor fin, with source and drain regionson either side of the gate electrode stack.

In one embodiment, exposing the semiconductor fin to the etchantinvolves completely removing the second layer of the epitaxial materialstack. The first semiconductor material is silicon, the secondsemiconductor material is Si_(y)Ge_(1-y), and the third semiconductormaterial is Si_(x)Ge_(1-x), where x>y.

In one embodiment, exposing the semiconductor fin to the etchantinvolves completely removing the fourth layer of the epitaxial materialstack. The first semiconductor material is silicon, the thirdsemiconductor material is Si_(y)Ge_(1-y), and the second semiconductormaterial is Si_(x)Ge_(1-x), where x>y.

In one embodiment, exposing the semiconductor fin to the etchantinvolves wet etching with a composition such as, but not limited to, anaqueous carboxylic acid/nitric acid/HF solution or an aqueous citricacid/nitric acid/HF solution.

In one embodiment, forming the gate electrode stack involves using areplacement gate process.

What is claimed is:
 1. A semiconductor device, comprising: a hybridchannel region comprising an omega FET portion disposed above and on ananowire portion disposed above a fin-FET portion, the omega FET portionhaving a wider portion on a narrower portion, the narrower portion onthe nanowire; a gate stack disposed on exposed surfaces of the hybridchannel region, the gate stack comprising a gate dielectric layer and agate electrode disposed on the gate dielectric layer, the gate stackcompletely separating the nanowire portion from the fin-FET portion ofthe hybrid channel region; and source and drain regions disposed oneither side of the hybrid channel region.
 2. The semiconductor device ofclaim 1, wherein the nanowire portion and the fin-FET portion of thehybrid channel region consist essentially of a first semiconductormaterial, and wherein the omega-FET portion comprises a bi-layercomprising an upper layer consisting essentially of the firstsemiconductor material and a lower layer consisting essentially of asecond, different, semiconductor material.
 3. The semiconductor deviceof claim 2, wherein the first semiconductor material is silicon, and thesecond semiconductor material is silicon germanium.
 4. The semiconductordevice of claim 2, wherein the lower layer of the omega-FET portion ofthe hybrid channel region is disposed on the nanowire portion of thehybrid channel region.
 5. The semiconductor device of claim 1, whereinthe fin-FET portion of the hybrid channel region is continuous with abulk semiconductor substrate.
 6. The semiconductor device of claim 5,wherein the gate stack is isolated from the bulk semiconductor substrateby a shallow trench isolation (STI) region or a bottom gate isolation(BGI) structure.